Abstract: This work describes a hybrid micro-electro-mechanical-systems (MEMS) microphone based on combined piezoelectric and capacitive transduction mechanisms to enhance the sensitivity. The ...
Key Laboratory of Polar Materials and Devices, Ministry of Education, Department of Electronics, East China Normal University, Shanghai 200241, China ...
Abstract: It is a long-lasting issue that process variations, such as residual stress and poor dimension definition, deteriorate resonant frequency control of a piezoelectric micromachined ultrasonic ...
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